Micro- and nano-electromechanical devices, referred to as MEMS and NEMS, are ubiquitous. These nanoscale machines with movable parts are used, for example, to trigger cars' airbags following a shock.

MEMS are primarily transducer systems that can control or sense chemical, optical, or physical quantities, such as fluids, acceleration, or radiation. A MEMS device/transducer possesses an electrical ...