Statistical process control (SPC) represents a suite of methodologies aimed at monitoring and maintaining the quality of manufacturing processes through the systematic collection and analysis of data.
How to avoid wafer-based testing during early technology development using a model to determine the optimal Si recess depth target and process window prior to source/drain epitaxy. A new methodology ...
A new methodology to assess the impact of fabrication inherent process variability on 14-nm fin field effect transistor (FinFET) device performance. August 18th, 2021 - By: Coventor A new methodology ...
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